http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-M527151-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_663cad2cddb9415ae5ba8d9c99803cda |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-108 |
| filingDate | 2015-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_972e1746a30971302ad1d7d323ea5aa7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d579e1128b23ead5fa82dfac6527ed22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d6c4ca6f8a1cee642ff730d5951140e |
| publicationDate | 2016-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-M527151-U |
| titleOfInvention | Thin film forming device |
| priorityDate | 2014-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.