| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dfcdab27b778da1d6b6420d581d0c2fe |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-2224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-2208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2019-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcfed4dc8927b931c291bd876824ab4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78f884b60ba1ce2a34ee2fedc957db8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36fb35f39680edbbd46080b76e8326b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f108c255dfac4aeea13998de20f45bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6fbb53ed37d9689d1114bfa2762409e |
| publicationDate |
2022-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I778248-B |
| titleOfInvention |
Tin dodecamers and radiation patternable coatings with strong euv absorption |
| abstract |
Patterning compositions are described based on organo tin dodecamers with hydrocarbyl ligands, oxo ligands, hydroxo ligands and carboxylato ligands. Alternative dodecamer embodiments have organo tin ligands in place of hydrocarbyl ligands. The organo tin ligands can be incorporated into the dodecamers from a monomer with the structure (RCC) 3 nSnQ, where R is a hydrocarbyl group and Q is a alkyl tin moiety with a carbon bonded to the Sn atom of the monomer and with a Sn bonded as a replacement of a quaternary carbon atom with bonds to 4 carbon atoms. Some or all of the carboxylato and hydroxyl ligands can be replaced with fluoride ions. Good EUV patterning results are obtained with the dodecamer based patterning compositions. |
| priorityDate |
2018-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |