| abstract |
The subject of this invention is to provide the purification method of the chemical|medical solution which can suppress short-circuiting of the semiconductor substrate manufactured by the photolithography process. Another subject of the present invention is to provide a method for producing a medicinal solution and a medicinal solution. The method for purifying a chemical solution of the present invention has a purification process of filtering a liquid to be purified using a filter, and in the method for purifying a chemical solution, a filter that satisfies Requirement 1 or Requirement 2 in the following test is used as a filter. Test: 1500 ml of the test liquid composed of an organic solvent and the filter were contacted at 23°C for 24 hours, and the test liquid after contact contained one selected from the group consisting of Fe, Al, Cr, Ni and Ti. The content of particles of at least one metal satisfies the prescribed requirements. |