http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I752013-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-02 |
| filingDate | 2017-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abf38d654407ebf2356eef44e22a7115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c7df139bb8b8a4400ab8cda5a63fb4a |
| publicationDate | 2022-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I752013-B |
| titleOfInvention | Polishing composition for polishing object having metal-containing layer, method for producing polishing composition, method for polishing, and method for producing substrate |
| abstract | The present invention provides a polishing composition for a polishing object having a metal-containing layer that can achieve sufficient flatness.nn n n The polishing composition of the present invention is a polishing composition for polishing an object to be polished having a metal-containing layer, comprising abrasive grains, an acid, an oxidizing agent and a dispersion medium, and the acid dissociation constant (pKa) of the acid is higher than that of the composition the pH. |
| priorityDate | 2016-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 383.