http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I750469-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e8d6cfae13c4423095049f3fcd20be8b |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3813 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-666 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-425 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-786 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3491 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-58071 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-6455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-58064 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3429 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22C29-14 |
| filingDate | 2019-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66e423f09121661446b779c1393068a9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3195fe2ca9ab94d52b1a335ee06e95e5 |
| publicationDate | 2021-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I750469-B |
| titleOfInvention | Target and process for producing a target |
| abstract | Target for physical vapour phase deposition having the following chemical composition:n- 95 mol% to 100 mol% of a mixture of at least two of the following compounds: titanium diboride (TiB 2 n) and/or vanadium diboride (VB 2 n) and/or mixed phases ((Ti,V)B 2 n) of titanium diboride (TiB 2 n) and vanadium diboride (VB 2 n)n- 0.01 mol% to 5 mol% of carbon (C)n- less than 0.01 mol% of borides other than titanium diboride (TiB 2 n) and/or vanadium diboride (VB 2 n) and/or mixed phases ((Ti,V)B 2 n) of titanium diboride (TiB 2 n) and vanadium diboride (VB 2 n),nwherein in respect of the metallic purity the sum of the mixture of titanium diboride (TiB 2 n) and/or vanadium diboride (VB 2 n) and/or mixed phases ((Ti,V)B 2 n) of titanium diboride (TiB 2 n) and vanadium diboride (VB 2 n) and the carbon (C) amounts to at least 99.8 mol%,nand having the following physical properties:n- a density greater than 90%, preferably greater than 95%, of the theoretical density of the chemical composition defined aboven- an average grain size of grains of the mixture of titanium diboride (TiB 2 n) and/or vanadium diboride (VB 2 n) and/or mixed phases ((Ti,V)B 2 n) of titanium diboride (TiB 2 n) and vanadium diboride (VB 2 n) of less than 10 micrometers, preferably less than 3 micrometers. |
| priorityDate | 2018-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.