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filingDate 2020-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2021-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I749964-B
titleOfInvention Alkaline cleaning composition, cleaning method, and manufacturing method of semiconductor
abstract An alkaline cleaning composition is provided. The alkaline cleaning composition includes an alkaline compound, 5 to 40% by weight of propylene glycol monomethyl ether, 10 to 30% by weight of water, and a polar solvent. Wherein, the polar solvent includes acetals, alcohol ethers, pyrrolidones, or a mixture thereof, and the alkaline cleaning composition excludes benzenesulfonic acid.
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