http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I748018-B

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filingDate 2017-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_830b8c370f2092414da814524918af24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563
publicationDate 2021-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I748018-B
titleOfInvention Resin, resist composition and method for manufacturing resist pattern
abstract The present invention provides a resin including a structural unit derived from a compound represented by formula (I') and a structural unit having an acid labile group. n (In the formula, R 1 and R 2 each independently represents an alkyl group which may have a halogen atom, a hydrogen atom or a halogen atom. Ar represents an aromatic hydrocarbon group which may have a substituent. L 1 represents a group represented by formula (X1-1) or the like. L 11 , L 13 , L 15 and L 17 each independently represents an alkanediyl group. L 12 , L 14 , L 16 and L 18 each independently represents -O-, -CO-, -CO-O-, -O-CO- or -O-CO-O-. * and ** are bonds, and ** represents a bond to an iodine atom.)
priorityDate 2016-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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