http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I746419-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_11d738aa9b5b691f2f5094e7b819ac93 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50 |
| filingDate | 2015-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_131957b52f5a04014d15ccc12cc043b1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_433b0a3ba404d84cc72092d9b4e92568 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00ca3a4a74e7909fe588406c527ec46e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f83925719ce766aa5fd2404388cbaee http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bf43cfa7662caefe39653ca43ac9b22 |
| publicationDate | 2021-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I746419-B |
| titleOfInvention | Photoresist stripper solutions |
| abstract | The disclosure is directed solutions and processes to remove substances from substrates. The substances can include photoresist. The solutions can include dimethylsulfoxide, a quaternary ammonium hydroxide, an alkanolamine, and less than 3% by weight water of a total weight of the solution. The quaternary ammonium hydroxide can include tetramethylammonium hydroxide, dimethyldipropylammonium hydroxide, or methyltriethylammonium hydroxide. Additionally, the solutions can include a secondary solvent. For example, the secondary solvent can include an alcohol. In another example, the secondary solvent can include ethylene glycol. Methods for the preparation and use of the solution to remove substances from substrates are also described. |
| priorityDate | 2014-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 311.