| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_517a04cc4bffc3d216b19f45c9bde10d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
| filingDate |
2017-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_366a7d3934af48dcd5c72dc55a52b700
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef860cc32d50cb3c5b4cb0f1ddb0436d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27ef411e64ca525b7c30d919af1be468
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_196b4de3a84076c0c053b5573a19669b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5296ae9f0fe1831fa40aae48a819371f |
| publicationDate |
2021-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I745379-B |
| titleOfInvention |
Etching composition containing hydrogen peroxide stabilizer |
| abstract |
The present invention provides a hydrogen peroxide stabilizer and an etching composition containing the same. The etching composition of the present invention contains the hydrogen peroxide stabilizer of the present invention to prevent the decomposition of hydrogen peroxide and control the over-etching of the metal interface when the etching step is performed. , Which has excellent etching characteristics. |
| priorityDate |
2016-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |