| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-1486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-0693
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-0053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2103-346
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2301-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2209-40 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-1459
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0618
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate |
2017-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70b74673874bc460f396b58b993db8ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_255ec440fb97a3e883e3a31cbfd31fa8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d949c5f5d76abfb09c459b47f40854d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_873243ef19de5c1f80642f6c60eb5daf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd1b808145855bbd3fe5701ca817c7b1 |
| publicationDate |
2021-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I739900-B |
| titleOfInvention |
Methods and systems for liquid particle prequalification |
| abstract |
Systems for prequalifying components for a processing chamber are described. The systems may be used to clean particulates from chamber parts and concurrently quantify the cleanliness. The systems may be used to qualify replacement parts before sending to a customer site for installation. The systems have three adjacent compartments separated by impermeable barriers. All three compartments are filled with liquid while cleaning a chamber component. The center compartment contains a submerged component for cleaning and qualifying. Two compartments on either side nof the center compartment are configured with submerged ultrasonic transducers to deliver ultrasonic energy to either side of the component being cleaned and prequalified. A liquid pump is connected to the cleaning tub to recirculate water from the spare part bath and another liquid pump is configured to remove a small amount of the spare part bath to sample particulates. |
| priorityDate |
2016-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |