| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6704
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68764
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02307 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate |
2018-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb1e4c6d48e70baab50fb5a65e27c7ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2d46585066cc529c25aa7d14adba053 |
| publicationDate |
2021-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I736735-B |
| titleOfInvention |
Substrate processing method and substrate processing apparatus |
| abstract |
A substrate processing method includes: a substrate holding step of horizontally holding a substrate with a metal film on the exposed upper surface; a substrate rotation step of rotating the aforementioned substrate around a vertical axis of rotation; liquid film formation The step is to supply the degassed processing liquid to the upper surface of the substrate, thereby forming a liquid film of the processing liquid on the substrate; and the film thickness adjustment step is to adjust the thickness of the liquid film to 100 μm or more To adjust the thickness of the aforementioned liquid film. |
| priorityDate |
2017-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |