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filingDate 2019-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7be0aff50bcf89e4bbfdefe18b56612d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93b52ea90b8cf3df745c3550960b900a
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publicationDate 2021-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I735988-B
titleOfInvention Substrate protective film-forming composition and pattern forming process
abstract A composition comprising (A) a polymer comprising recurring units (a1) having a carboxyl group protected with an acid labile group and recurring units (a2) having a cyclic ester, cyclic carbonate or cyclic sulfonate structure, (B) a thermal acid generator, and (C) an organic solvent is suited to form a protective film between a substrate and a resist film. Even when a metal-containing resist film is used, the protective film is effective for preventing the substrate from metal contamination.
priorityDate 2018-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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