| abstract |
In the wet cleaning process using carbon dioxide-dissolved water, the present invention highly removes extremely small particles mixed in the carbon dioxide-dissolved water to prevent contamination by the particles, and cleans the cleaned objects to a high degree of cleanliness. The wet cleaning device of the present invention uses carbon dioxide-dissolved water formed by dissolving carbon dioxide in ultra-pure water to clean the objects to be cleaned, and is characterized by having: a carbon dioxide dissolving means for dissolving carbon dioxide in ultra-pure water , And a cleaning means for supplying carbon dioxide-dissolved water from the carbon dioxide dissolving means to be cleaned, and, provided on the pipe for supplying the carbon dioxide-dissolved water to the cleaning means and filled with porosity with cationic functional groups Membrane filtration membrane module. |