http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I733994-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa0f2776bcc27d5099aa97f3212e1681 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68327 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6836 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K101-40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K31-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 |
| filingDate | 2018-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c29f453808fe9a6e10cd2122be801a5 |
| publicationDate | 2021-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I733994-B |
| titleOfInvention | processing methods |
| abstract | [Problem] To provide a processing method that can maintain the quality of the processing and increase the processing speed when processing a plate-like workpiece in which a metal-containing laminate is formed overlying on a planned cutting line. [Solution] A processing method for processing a plate-shaped workpiece in which a metal laminate is formed overlapping on the planned cutting line, including the following steps: a first holding step, holding one of the workpieces with a first holding table The layered body side; a dry etching step of dry-etching the object to be processed through a masking material provided in a region other than the planned cutting line, thereby forming an etching groove along the planned cutting line to retain the layered body; The second holding step is to hold the workpiece on the laminated body side or the opposite side to the laminated body with the second holding table; and the cutting step is to cut the bottom of the etching groove with a dicing knife, and the processed object will be processed along the planned cutting line The object is cut together with the laminate, and in the cutting step, cutting is performed while supplying a cutting fluid containing an organic acid and an oxidizing agent to the workpiece. |
| priorityDate | 2017-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 156.