http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I716090-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6ac179bcbad17b8ea0260c65f201da92 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-44 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-3563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N31-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-407 |
| filingDate | 2019-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b5348febae939fde53eadb9dfc9ed76 |
| publicationDate | 2021-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I716090-B |
| titleOfInvention | Method for determining oxygen or carbon in semiconductor material |
| abstract | A method for determining the content of oxygen or carbon in semiconductor material by gas fusion analysis comprisingncleaning a crucible and a test sample of the semiconductor material by inductively heating the test sample in the crucible to a temperature of not less than 1300 °C in a stream having a composition of nitrogen or a mixture of nitrogen and at least one rare gas; andndetermining the content of oxygen or carbon in the test sample of semiconductor material in a measuring chamber (2) of a measuring device (100), comprising inductively heating in the measuring chamber (2) the test sample in a gas stream having said composition and melting the test sample in the crucible (1); reacting oxygen contained in the test sample with carbon or reacting carbon contained in the test sample with oxygen to form at least one oxidation product; and determining the amount of the at least one oxidation product and using the amount of the at least one oxidation product as a measure of the content of oxygen or carbon contained in the test sample. |
| priorityDate | 2018-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.