| abstract |
The present invention is a method for forming a contact hole pattern, which includes the step of forming a hole pattern; a step of applying a first composition along the side surface of the hole in a ring shape in a plan view; A step of forming a resin layer from the second composition; a step of phase-separating the resin layer; and a step of removing a part of the phase-separated resin layer. The first composition contains a first polymer and a solvent, and the second The composition contains a second polymer and a solvent, and the second polymer includes a first block having a first structural unit and a second block having a second structural unit higher in polarity than the first structural unit, and The static contact angle A (°) between the side surface of the hole and water immediately before the resin layer forming step satisfies the following formula (1). |