http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I710055-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32681f1832d227fe8df23d12a37f67a8 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q3-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4586 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4581 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3255 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2020-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ef14949324914faacd2341497b610fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bca6278d1e7bdcedff8e98932a1f973d |
| publicationDate | 2020-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I710055-B |
| titleOfInvention | Electrostatic chuck |
| abstract | The subject of the present invention is to provide an electrostatic chuck that can improve plasma controllability.nn n n n n The solution of the present invention is an electrostatic chuck, including: a ceramic dielectric substrate with first and second main surfaces; a base plate; a first electrode layer, which is arranged inside the ceramic dielectric substrate, and high frequency Power connection; The second electrode layer is arranged inside the ceramic dielectric substrate and connected to the power supply for adsorption. The first electrode layer is arranged between the first main surface and the second main surface in the Z-axis direction. The dimension in the Z-axis direction of one electrode layer is larger than the dimension in the Z-axis direction of the second electrode layer, and the second electrode layer is arranged between the first electrode layer and the first main surface in the Z-axis direction. An electrode layer has a first surface on the first main surface side, and a second surface on the opposite side of the first surface, and is powered from the second surface side. The first electrode layer has a first portion including the first surface, and the first electrode The layer contains a ceramic component and a metal component, and the concentration of the ceramic component in the first part is higher than the average concentration of the ceramic component in the first electrode layer. |
| priorityDate | 2019-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.