http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I700549-B

Outgoing Links

Predicate Object
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-82
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-10
filingDate 2016-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2020-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b10b2ff2801520a0fee86cbc92a9730
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_044227b919fe068131de5f9b17f855be
publicationDate 2020-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I700549-B
titleOfInvention Apparatus for the application of a liquid medium exposed to uv-radiation on substrate
abstract The present invention discloses a method for applying liquid medium exposed to UV radiation onnThe device on the substrate has the following components: a housing including an elongated chamber, at least one inlet opening to the chamber, and a slit-shaped outlet opposite to the at least one inlet and extending within the length of the chamber ; A tube extending longitudinally through the chamber, which is at least partially transparent to UV radiation, wherein the tube is arranged in the chamber such that a flow cavity is formed between the tube and the wall of the chamber, which is opposite to the chamber The longitudinal center plane of the discharge port is symmetrical, and the pipe extends into the slit-shaped discharge port in the housing, and wherein two discharge slits extending in the longitudinal direction are formed between the pipe and the housing; and at least one is located in the pipe A UV radiation source, which is adapted to emit UV radiation in a manner directed toward the flow cavity and emitted from the housing through an exhaust port. The device is characterized in that the flow cross section of the flow cavity is reduced from the area adjacent to the at least one inlet to the discharge slit. In this way, the acceleration of the liquid can be realized when the liquid flows toward the discharge slit in practical applications, thereby making the flow uniform. In the area of the discharge slit, a uniform liquid curtain can be formed outside the casing, which can be applied to the substrate. In addition, by reducing the flow cross-section, UV radiation can be evenly delivered into the liquid.
priorityDate 2015-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001300451-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102009058962-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014153570-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004241726-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008108997-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526621

Total number of triples: 26.