| abstract |
A composite metal oxide target having a chemical formula A x nCs y nWO z nis provided, wherein 0.2≤x≤2, 0.2≤y≤0.4, 2.5≤z≤4, and A is selected from a group consisting of Bi, B, Al, Zn, Zr, Si, V and Co. The invention also provides a composite metal oxide film formed by a dry plating process using the composite metal oxide target. The composite metal oxide target has high density and simple process, and the composite metal oxide film has multiple effects like UV resistant, visible light penetration, and infrared blocking. |