| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-121 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G08B21-182
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F23-22 |
| filingDate |
2018-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1d69abff5c91651561f673d8f133edc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89a7466adea6649bd17dd240f6c16fea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bac02a08434f71f20ebd8f9d68254c0 |
| publicationDate |
2020-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I698627-B |
| titleOfInvention |
Liquid sensing device and sensing method thereof |
| abstract |
A liquid sensing device includes: a sensor configured to produce a change in a parameter value when in contact with a liquid, wherein the sensor is flexibly linear and configured to traverse a path within a semiconductor processing system; and a controller configured to produce an alert signal based on the change in the parameter value. |
| priorityDate |
2017-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |