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publicationDate 2020-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I694596-B
titleOfInvention Bonded memory element and its manufacturing method
abstract A method for forming a bonded semiconductor component includes the following steps. First, a first wafer and a second wafer are formed. The first wafer includes a functional layer over the substrate. The single crystal silicon is necessary for the substrate, and the substrate may not include single crystal silicon. The first wafer can be inverted to bond to the second wafer so as to form a bonded semiconductor device such that the substrate is on the top of the functional layer. At least a portion of the substrate is removed to form a top surface of the bonded semiconductor device. Additionally, bond pads are formed over the top surface.
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