http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I694172-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6038f17109882ad88e9ba8ea907ebb45 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0789 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
| filingDate | 2016-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28f4fc76f9d53245ae1aa9f5cd47dd43 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b2019deb804b9446e634283d72ec3a2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a37361f6bc44a91e67d040d34cb3b2c |
| publicationDate | 2020-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I694172-B |
| titleOfInvention | Etching liquid, replenishing liquid and method for forming copper wiring |
| abstract | The present invention provides an etching solution and its replenishing solution, and a method for forming copper wiring, which can suppress side corrosion without reducing the linearity of copper wiring (wiring width on top of copper wiring (W2)), and can suppress copper wiring Uneven wiring width (W1) at the bottom.nn n n The copper etching solution of the present invention contains an acid and one or more compounds selected from the group consisting of aliphatic acyclic compounds, aliphatic heterocyclic compounds, and heteroaromatic compounds; the aforementioned aliphatic acyclic compounds The compound is a saturated aliphatic non-cyclic compound (A) having 2 to 10 carbon atoms and has only 2 or more nitrogen atoms as a hetero atom; the aforementioned aliphatic heterocyclic compound is a compound containing a 5-membered ring to a 7-membered ring (B ), the 5-membered ring to the 7-membered ring have more than one nitrogen as a hetero atom constituting the ring; the heteroaromatic compound is a compound (C) containing a 6-membered aromatic heterocycle, and the 6-membered aromatic heterocycle has one The above nitrogen serves as a hetero atom constituting the ring. |
| priorityDate | 2015-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 750.