http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I694117-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2baf849d216e689ecc40ccc931a7a7bc |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-062 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D125-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-00 |
| filingDate | 2016-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d338fa9da212910df6f0916095817b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a711bc3b636d50759f45fe96daf5a02d |
| publicationDate | 2020-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I694117-B |
| titleOfInvention | Coating solution for photoresist pattern coating and method for forming pattern |
| abstract | The present invention is to provide a new coating solution for photoresist pattern coating, which contains: a polymer having a structural unit represented by the following formula (1), a first stage represented by the following formula (2), The second or third amine and the ester represented by the following formula (3) that can dissolve the aforementioned polymer and amine.nn n n n n n n n n n [(In formula (1), R 1 represents a hydrogen atom or a methyl group, L represents a divalent aromatic group which may have at least one substituent, a -C(=O)-O- group, or -C(=O)- NH- group, X represents a hydrogen atom, or a linear or branched alkyl or alkoxy group having 1 to 10 carbon atoms, at least one hydrogen atom of the alkyl group may be substituted with a halogen atom or a hydroxyl group)n n n (In formula (2), R 2 , R 3 and R 4 each independently represent a hydrogen atom, a hydroxyl group, or a linear, branched or cyclic organic group having 1 to 16 carbon atoms)n n n (In formula (3), R 5 and R 6 each independently represent a linear or branched organic group having 1 to 16 carbon atoms)]. |
| priorityDate | 2015-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 111.