http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I687671-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31749 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31745 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-2886 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-204 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2602 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-045 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-286 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-31 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-32 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 |
| filingDate | 2016-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc90ffac9983a75b353d13b0760e642c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed824e7892233006d11651dba4fffbd9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6af90c75a7795476053a12f3e70b5575 |
| publicationDate | 2020-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I687671-B |
| titleOfInvention | Method for preparing a sample for microstructure diagnostics, and sample for microstructure diagnostics |
| abstract | The present invention relates to a method for preparing a sample for microstructure diagnosis, which includes the following steps: (a) The sample body is released by at least one laser beam incident perpendicularly and/or obliquely to the substrate surface by means of at least one laser processing operation, so that The shape of the sample body: the shape has at least one sturdy operation section and a target section that is thinner than the operation section bordering the operation section; (b) manufacturing a sample body holder separate from the sample body , Which has an accommodating structure matching the shape of the sample body to accommodate the sample body in a defined accommodating position; (c) removing the released sample body from the substrate; (d) removing the sample body from the substrate Fixed at the receiving structure of the sample body holder; (e) performing at least one additional material etching process on at least one side of the sample body in the region of the target section by means of laser beam and/or ion beam processing to expose Target section. |
| priorityDate | 2015-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963 |
Total number of triples: 29.