| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7afe45c72b078ef1f46c0fb47617bcb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B43-113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49236 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B49-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D19-0063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B35-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B43-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B43-067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B17-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B53-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B43-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B43-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B49-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D19-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B53-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B19-048 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04B43-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04B49-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05B19-048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04B17-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04B35-00 |
| filingDate |
2014-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_455418037be5dca061761577fca6130d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbb89b3439cbd58430fa946d0339b141
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e072108482d24790d9ef6f92d64553f0 |
| publicationDate |
2020-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I687594-B |
| titleOfInvention |
Comprehensive pump system and method having a quick change motor drive, automated gas removal and fluid recovery system and remote monitoring, viewing and control thereof |
| abstract |
A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping nfluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a process fluid reservoir and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the process fluid reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the process fluid reservoir via a valve in case a need to insert a gas is required. |
| priorityDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |