| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-34 |
| filingDate |
2015-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a6e6d6a89b1e392da39a6b8255a2418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fa6584838264f433a0a978c987aacd4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d00365d26d0e02de0bbe9a11c4b2f27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0197fa1e20e044443064dc8349d18069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6188b7c35d8337b7ecba35be80e590f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_638eff465046849df93493e00bcd0c0f |
| publicationDate |
2020-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I687134-B |
| titleOfInvention |
Nozzle for uniform plasma processing |
| abstract |
A nozzle for uniform plasma processing comprises an inlet portion and an outlet portion. The inlet portion has a side surface substantially parallel to a vertical axis. The inlet portion comprises a plurality of gas channels. The outlet portion is coupled to the inlet portion. The outlet portion comprises a plurality of outlets. At least one of the outlets is at an angle other than a right angle relative to the vertical axis. |
| priorityDate |
2014-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |