| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01K1-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F21S2-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01K1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-0038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01K1-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J61-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F21V23-06 |
| filingDate |
2014-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c455b31e5f6b02b7efe2d2b8ff9cb07b |
| publicationDate |
2020-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I685874-B |
| titleOfInvention |
Simplified lamp design |
| abstract |
Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design. |
| priorityDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |