http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I684234-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5abd4444e2fcd867f8d9eeea7f6c34b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67376 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67775 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67201 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate | 2014-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6de8b289c70d818d9af06991fd5f15c5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47145c1c91c3d6db7376aabeb0c21472 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b5b5d7f830c5e41628f0e8bf8e1859a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ff39fa968d24273f99bc6cf49c72d35 |
| publicationDate | 2020-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I684234-B |
| titleOfInvention | Substrate transport |
| abstract | A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier. |
| priorityDate | 2013-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.