| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f207d0b8ca4a8c3db5cbe9a8b5c32c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L11-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L53-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L27-11 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L53-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L9-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16L53-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate |
2018-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8851b821636d314d4cc41ea77db2fde1 |
| publicationDate |
2020-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I682478-B |
| titleOfInvention |
Easily installing triple tube heating device fro heating exhaust gas from semiconductor and lcd manufacturing process |
| abstract |
A triple tube heating device for heating the exhaust gas from the semiconductor and LCD manufacturing process, only uses a few heat to effectively heat the exhaust gas without using the nitrogen. The device which has a triple tube structure, can extend and bend, such that it is easy to be installed and quickly sensing the leakage and overheating of the exhaust gas. |
| priorityDate |
2017-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |