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publicationDate 2020-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I682459-B
titleOfInvention Plasma activated conformal dielectric film deposition
abstract Methods of depositing a film on a substrate surface include surface mediated reactions in which a film is grown over one or more cycles of reactant adsorption and reaction. In one aspect, the method is characterized by intermittent delivery of dopant species to the film between the cycles of adsorption and reaction.
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