| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_347b5a7147a5d96032eda0149bc9a798 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-34 |
| filingDate |
2018-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1652395a492d5e7096092661d6e426e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af159882352cf3d6a8611887fa1b2aad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ca8a2d2d76fe78781e472a18852f767
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae662f7947903862e727ad3544ffc5fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e27f3441dd97e6096daa65abf97dfce0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c1de7ef2d9534ccbba5c9d7acec194c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b311439def2fd879e12f6f5b83f2c436 |
| publicationDate |
2019-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I680696-B |
| titleOfInvention |
Plasma processing device |
| abstract |
Plasma processing equipment, including: A first unbalanced terminal connected to the impedance matching circuit, a second unbalanced terminal grounded, a first balanced terminal, a second balanced terminal, and a first connection between the first unbalanced terminal and the first balanced terminal A coil and a balun of the second coil connecting the second unbalanced terminal and the second balanced terminal; Grounded vacuum container; A first electrode electrically connected to the first balanced terminal; A second electrode electrically connected to the second balanced terminal; and an adjustment reactor that affects the relationship between the first voltage applied to the first electrode and the second voltage applied to the second electrode. |
| priorityDate |
2017-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |