http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I679390-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F26B3-18 |
| filingDate | 2015-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cb4901c23f3f92e383f3d2badcfe678 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1211bdacc119b1b792626fbfd5780fe5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a58f3df90e61eafc0e589ec9aa1f755f |
| publicationDate | 2019-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I679390-B |
| titleOfInvention | System and method for using sacrificial support material that can be removed by using hydrogen-rich plasma to dry high-aspect-ratio structure without collapse |
| abstract | A system and method for drying a substrate including a plurality of high aspect ratio (HAR) structures includes performing at least one of wet etching and / or wet cleaning on the substrate using at least one of a wet etching solution and / or a wet cleaning solution, respectively. This is performed afterwards and without drying the substrate. The flow system between the plurality of HAR structures is replaced with a solvent containing a supporting material. After the solvent has evaporated, the support material precipitates from the solution and at least partially fills the plurality of HAR structures. The substrate is exposed to a plasma generated using a plasma gas chemical rich in hydrogen to remove the supporting material, thereby drying the substrate containing the HAR structures without damaging the plurality of HAR structures. |
| priorityDate | 2014-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 44.