| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1653
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1619
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76874
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1893
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-00 |
| filingDate |
2016-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40acccc91402c3500398073bb9a927ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2cc0c57761f4e92c62eb14baa353eca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_056b60d3041479077449e921ca5b5ebb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5df819cd5f91e10404e4efc293f3f9a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dca9399eeb790cc7fc34ff77f0ad91a |
| publicationDate |
2019-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I679301-B |
| titleOfInvention |
Compact layer forming method, compact layer forming system and memory medium |
| abstract |
The invention relates to a method for forming a compact layer, a compact layer forming system and a memory medium, and the subject thereof is to form a compact layer of a thin film on the surface of a substrate.nn n n The solution is that for a substrate, a method for forming a compact layer forming a compact layer includes a process of supplying a coupling agent to the substrate (2) while rotating the substrate (2). The substrate (2) is rotated at a low speed of 300 rpm or less. In this state, a coupling agent diluted by IPA is supplied to the substrate (2). |
| priorityDate |
2015-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |