http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I678413-B
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c19a91365ed494d9fe27d24190d4459f |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
filingDate | 2016-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2019-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c16e478235409399e0017e6c2161058 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_633dfb2f08b0b46fbcb170fb985f9c9b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_292bb1a9bba7ee6003a4a05857397e36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10de882f93c61726e7c57302d4a443a7 |
publicationDate | 2019-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-I678413-B |
titleOfInvention | Etching solution and etching concentrated solution for multilayer film and etching method |
abstract | For the multilayer film of copper layer and molybdenum layer to be etched with one liquid, the cross-sectional shape of the edge after etching must be a forward-tapered shape without undercut, and no precipitates are generated in the etching solution. It is important to use it from time to time.nn n n An etching solution for a multilayer film containing a copper layer and a molybdenum layer containing hydrogen peroxide, an inorganic acid, an acidic organic acid, a neutral organic acid, an amine compound, and a hydrogen peroxide inhibitor. Since it does not contain an azole compound, No reactant is formed between them, and no precipitate is generated in the etching solution. Furthermore, the cross-sectional shape of the edge after etching can be made into a desired forward taper shape. Furthermore, since neither a phosphorus compound nor a fluorine compound is contained, the environmental load at the time of disposal is light. |
priorityDate | 2015-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 164.