| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c4195088374a7fca162ca5d84b50ee25 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2208-00902
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2208-00495 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J8-1827
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B15-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4417
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B15-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B15-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B15-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J8-1872
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J8-1836
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F27B15-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-442 |
| filingDate |
2015-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8b274c6d111fcd565ee3d6b76bf9b4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a19df079a4d5c70ab188e07ceec9e2b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30fb13c25aedcd5c0f27a61aa033ab4a |
| publicationDate |
2019-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I675118-B |
| titleOfInvention |
Tantalum deposition reactor with bottom seal configuration |
| abstract |
The invention discloses a fluidized bed reactor system for producing high-purity silicon-coated particles. A container has: an outer shell; an insulating layer positioned inside the outer shell; a concentric inner shell positioned inside the outer shell; and a concentric gasket positioned inside the outer shell The inside of the housing and defines a reactor chamber. The inner shell and the gasket are sealed together at their bottoms by an O-ring seal arrangement to prevent gas in the reactor chamber from entering the space between the inner shell and the gasket . A central inlet nozzle produces a vertical plume of gas in the reactor chamber. |
| priorityDate |
2014-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |