http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I673569-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-29 |
| filingDate | 2015-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd7a3f69ad120ab203d9c8a923c6c38e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_897495346d2d632e4f5c9e29b395c607 |
| publicationDate | 2019-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I673569-B |
| titleOfInvention | Photosensitive resin composition for forming interlayer insulating film, interlayer insulating film, and method for forming interlayer insulating film |
| abstract | An object of the present invention is to provide a photosensitive resin composition for forming an interlayer insulating film, an interlayer insulating film, and a method for forming the interlayer insulating film.nn n n Means for Solving the Problem The photosensitive resin composition for forming an interlayer insulating film of the present invention is a resin containing an alkali-soluble resin (A), a photosensitizer (B), a silane coupling agent (C), and a crosslinking agent (D) The photosensitive resin composition for forming an interlayer insulating film, wherein the crosslinking agent (D) is at least 1 selected from the group consisting of an oxetane-containing compound, an epoxy-containing compound, and a block isocyanate compound. Species. |
| priorityDate | 2014-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 382.