| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_31da94917d1067c89f7e22444c88a836 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823871
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4975
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4966 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-528 |
| filingDate |
2016-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36812bf696839f1dcd9e6f212f9979cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b52c117ad8838c96f63964bcab7b805e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62061824ac3b69f2a7a498e00b80e1aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_224f62cb6b69d86b869f446a6cf1d71a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f522cdc4545acdb54cd37541c2fe7b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83775b34ae36e229d6296cc5cbd08670 |
| publicationDate |
2019-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I668728-B |
| titleOfInvention |
Virtual gate used as interconnection and its preparation method |
| abstract |
A virtual gate process for interconnecting and a method of making the same are disclosed. Embodiments include: forming a dummy gate structure at a cell boundary on a semiconductor substrate, each dummy gate structure including a set of sidewall spacers and a cap layer disposed between the sidewall spacers; removing the first dummy gate a first sidewall spacer or at least a portion of the first cap layer on the first side of the pole structure, and a first gate contact trench formed over the first dummy gate structure; and filling the first gate with a metal The trench is contacted to form a first gate contact. |
| priorityDate |
2015-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |