| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5128cfc84a0fb189fceb3cd240c44493 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2017-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0502195b3ce551cb9a304476824d2570
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33feb1d6ee6d5be35d6b92488098b03b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de545aad98e45b44ff12bdee72d74334 |
| publicationDate |
2019-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I666521-B |
| titleOfInvention |
Photosensitive resin composition and photosensitive resin laminate |
| abstract |
The present invention provides a photosensitive resin laminate that exhibits high resolution and good line width reproducibility even when the focus is shifted during exposure. The photosensitive resin laminate system includes a support film and a photosensitive resin composition layer containing a photosensitive resin composition formed on the support film, and a square shape with a side of 5 mm is cut out at any 10 positions of the support film. In the case of small pieces, the number of fine particles of 1.5 μm or more and less than 4.5 μm contained in each small piece is 0 to 200 on average in the above 10 places. |
| priorityDate |
2016-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |