http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I666418-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F26B5-04 |
| filingDate | 2017-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_352e7bc57560deddcc3c3aff2b9805ee http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0e5bc986e588c3a8b08ca75e6cc147c |
| publicationDate | 2019-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I666418-B |
| titleOfInvention | Decompression drying device |
| abstract | The device can be configured in a simple manner. In both the reduced-pressure drying device that performs the reduced-pressure drying treatment of the solvent on the substrate and the desorption treatment of the solvent from the solvent trapping section, the time of the above-mentioned reduced-pressure drying treatment and the time of the above-mentioned release treatment are shortened. . The reduced-pressure drying device (1) is a device for drying a solution stored on a substrate (W) in a chamber (10) under reduced pressure, and includes a solvent trapping portion (30), which is formed of a mesh plate. In addition, the solvent in the solution vaporized from the substrate (W) is temporarily collected, and the solvent capturing portion (30) is disposed in the chamber (10) to face the substrate (W) to form a solvent capturing portion (30). The mesh plate has an opening ratio of 60% to 80%, and the heat capacity per unit area is 850J / K ･ m 2 or less. |
| priorityDate | 2016-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.