http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I663282-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45534 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate | 2015-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_489deaad5f5200a2e15ccf4525a3aa6c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5669766dbad0e860ece13373341e2962 |
| publicationDate | 2019-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I663282-B |
| titleOfInvention | Film forming device, film forming method, memory medium |
| abstract | A film-forming device is a film-forming device that obtains a thin film by laminating a molecular layer of an oxide on a substrate surface under a vacuum atmosphere formed in a vacuum container. The film-forming device includes a raw material gas supply unit for adsorbing raw materials on the substrate. A substrate in a vacuum container, and a raw material gas containing the raw material is supplied to the substrate; an atmosphere gas supply unit is configured to form an ozone atmosphere containing ozone having a concentration higher than a concentration that will cause a chain decomposition reaction in the vacuum container. Atmospheric gas; the energy supply unit is forcibly decomposing the ozone by supplying energy to the ozone atmosphere to generate an oxygen active group, and oxidizing the raw material adsorbed on the substrate surface by the active group to obtain The oxide; the control unit outputs the control signal in a cycle consisting of the supply of the source gas, the supply of the atmospheric gas, and the energy supply repeatedly; the buffer area is for the purpose of reducing the The pressure in the vacuum container caused by the decomposition rises, and is set to be connected to the vacuum container and supply inactive gas; Division means, the line is supplied to the atmosphere in the vacuum container, the vacuum container with respect to the division of the buffer area, while in the decomposition of the generated ozone, the vacuum container with respect to the communication buffer area. |
| priorityDate | 2014-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 42.