http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I662691-B
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1362 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 |
filingDate | 2014-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2019-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df5dc13124f38c33b00f1247138e1e82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac79c067a983b6ac76c9bb38646da883 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a16960b5b11f1fdfb9bb80ed25c4ab1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cedd440bdc50b81298850f2504eb1f1c |
publicationDate | 2019-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-I662691-B |
titleOfInvention | Method for manufacturing array substrate for liquid crystal display |
abstract | A method of manufacturing an array substrate for a liquid crystal display, the method comprising: a) forming a gate wiring on a substrate; b) forming a gate insulating layer on a substrate having the gate wiring; c) insulating the gate Forming a semiconductor layer on the layer; d) forming a source electrode and a drain electrode on the semiconductor layer; and e) forming a primitive electrode connected to the drain electrode, wherein step a) or step d) includes: on the substrate or the Forming a Cu-based metal film on the semiconductor layer, and forming the gate wiring or the source electrode and the drain electrode by etching the Cu-based metal film using an etchant composition, and the etchant composition is for a Cu-based metal film The etchant composition includes hydrogen peroxide (H 2 O 2 ), phosphorous acid or a polybasic compound, and water. |
priorityDate | 2013-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 77.