| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-20 |
| filingDate |
2012-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90cde7fc84b171954b53d599d415c8be
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42b67b4216293b1b51473f0010684970 |
| publicationDate |
2019-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I655309-B |
| titleOfInvention |
Metal aluminum alloy film from metal cerium salt precursor and aluminum precursor |
| abstract |
The invention describes a method for depositing a metal aluminum film using a metal hafnium salt precursor and an aluminum precursor. Such metal aluminum films may include metal aluminum carbide films, metal aluminum nitride films, and metal aluminum carbonitride films. The aluminum precursor may be an aluminum alkyl precursor or an amine alane. |
| priorityDate |
2011-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |