http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I654639-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8dcab124639472d352cd77822e4be46 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31705 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-08 |
| filingDate | 2014-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74e143edd9a28f21fafb40093c09bca5 |
| publicationDate | 2019-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I654639-B |
| titleOfInvention | Ion generating device and ion generating method |
| abstract | The present invention has been completed in view of such circumstances, and its purposenTo provide a technique for reducing the contamination of heavy metal ions during ion implantation and generating high productivity ions.nn n n The ion generating device (10) is provided with an arc chamber (n12), at least part of which is composed of a material containing carbon; a thermoelectron emitting portion (14) for discharging hot electrons into the arc chamber (12); and a gas introduction port (24) for source gas and compounding The gas is introduced into the arc chamber (12). The source gas introduced into the arc chamber contains a halide gas, and the composite gas introduced into the arc chamber contains a compound having carbon atoms and hydrogen atoms. |
| priorityDate | 2013-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.