http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I651019-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J2005-583 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32917 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32724 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-0043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K17-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K17-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2014-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd387bf696d3166b630a637a35eca73d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9f4ac9f16499b5be841cb4fe59be7f2 |
| publicationDate | 2019-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I651019-B |
| titleOfInvention | Heat flux measuring method, substrate processing system, and heat flux measuring member |
| abstract | The present invention aims to provide a heat flux measurement method for measuring the ion flux of a plasma as a heat flux in a heat flux measurement member. Among them, the first heat flux measurement member S in which the first layer 41, the second layer 42 and the third layer 43 are stacked in the following order is obtained by exposing the first heat flux measuring member S to the plasma and irradiating low-coherence light in the stacking direction. Reflected light, the optical path length of the low-coherence light traveling back and forth in the thickness direction in the first layer 41 in the first layer 41 and the low-coherence light traveling back and forth in the thickness direction in the third layer 43 is measured in the third layer 43 The optical path length within. Correction data showing the relationship between the temperature of the first heat flux measurement member S and the optical path length of each low-coherence light in the first layer 41 and the third layer 43 is prepared in advance, and the first layer 41 and the first layer are calculated. The temperature of the three layers 43 is calculated from the temperatures of the first layer 41 and the third layer 43 and the thickness and thermal conductivity of the second layer 42 to calculate the heat flux q flowing through the first heat flux measurement member S. . |
| priorityDate | 2013-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.