| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-352
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2686
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C21D1-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0988
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B27-0911
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-064 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 |
| filingDate |
2013-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a014a5716bd1127a6c085ad4f35d580 |
| publicationDate |
2018-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I645457-B |
| titleOfInvention |
Specialized diaphragm for controlling edge contours in laser annealing systems |
| abstract |
Embodiments of the present invention generally relate to a laser annealing system with optical elements for imaging a pattern on a substrate. The optical element may include one aperture or a plurality of apertures that make up the shape of the pattern to be exposed on the surface of the substrate. The pattern can be determined by the shape of the aperture in the optical element system. |
| priorityDate |
2013-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |