| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D127-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D165-04 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B41-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 |
| filingDate |
2014-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d32aa88ac2e1d0e47292d939483cedc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84b1cef34a9fcdef75323cd5d16467b1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5001f5d1432b932e6510de5efef5d34a |
| publicationDate |
2018-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I643967-B |
| titleOfInvention |
Coated retaining ring |
| abstract |
A retaining ring for a grinding system is disclosed herein. The retaining ring has a process resistant coating that overlies a portion of the retaining ring. The anti-process coating is a thin, smooth, conformal layer that is resistant to abrasion and chemical attack. The anti-process coating is formed by a method comprising vapor deposition from a precursor gas mixture which may deposit parylene from a gas mixture comprising a ring enthalpy. Adhesion of the process resistant coating to the retaining ring can be enhanced by treating the surface of the ring prior to forming the coating. The resistance of the coating to the process can be further enhanced by imparting texture to the surface of the coating by etching or depositing a gas. |
| priorityDate |
2013-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |