http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I643345-B

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2029-7858
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01074
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823857
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0924
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6656
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823821
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41791
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
filingDate 2012-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d29cfe9b79e4ea269061d5ae2d65184a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9526c625fbe9902021df7b1e0151302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42e62f99052cdd4e8d27672be65ee7d4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_260a2f7127b199ea4953e23c1ea8f67f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12feef257b38601f88e27e58f04838e9
publicationDate 2018-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-I643345-B
titleOfInvention Tungsten gate technology for non-planar transistors (4)
abstract This description relates to the field of fabricating microelectronic devices having non-planar transistors. Embodiments of the present description relate to forming a gate in a non-planar NMOS transistor, wherein an NMOS work function material, such as aluminum, titanium, and carbon, can be used in combination with a titanium-containing gate filling barrier to facilitate formation. A tungsten-containing conductive material is used in a gate electrode of the non-planar NMOS transistor gate.
priorityDate 2011-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011147851-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007235763-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006071275-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004036127-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516414
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159940049
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID44544175
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447615589
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526467
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452894838
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3468413
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57369535
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82832
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425762086
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4389803
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13135
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451375255
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452908191
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21889137
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451522145
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123185
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453010884
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520403
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557764
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454240392
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31170
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6326954
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527022
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520488
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID522684
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524988
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159433
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453507713
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159434
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID292779
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23964
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523132
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525060
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91500
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426031689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522147
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17358

Total number of triples: 86.