| abstract |
Provided is a novel method for producing a polymer which is easy to control by reaction, simple, and excellent in film thickness control, a manufacturing apparatus, a method for producing an organic film, and a manufacturing apparatus. For example, by using a manufacturing apparatus, a mist or a droplet generated by atomizing or dropletizing a raw material solution containing an organic compound such as a monomer is transported to a substrate by a carrier gas, and then the atomization is performed by heating on the substrate. Or the droplets are thermally reacted to form an organic film such as a polymer. The manufacturing apparatus includes: a first unit that atomizes or dropletizes a raw material solution containing an organic compound; a second unit that transports mist or droplets to the substrate by a carrier gas, and a third unit on the substrate The atomization or the droplet is thermally reacted by heating |