| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_379bc5163b5aa634ddc5e7fcb302b871 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06744
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-208 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 |
| filingDate |
2015-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b83d1916e08ee7fd8cb6e02c1bfda510
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99e84053c53ab802a3751b002808cab8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_580047c0c44ae2a84b49b8c301fa2010 |
| publicationDate |
2018-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I634331-B |
| titleOfInvention |
Nano detection system for electronic devices and nano probes thereof |
| abstract |
The invention provides a system combining a scanning electron microscope (SEM) and a nanometer probe for testing a semiconductor device (DUT) to be tested. The detection method provided by the system includes: obtaining a region of interest (ROI) in the DUT; SEM image; obtain the CAD design image of the ROI; align the CAD design image with the SEM image to identify the target that should be touched; obtain a netlist corresponding to the target that should be touched, and use the netlist to determine the target Among the touchable targets, the touchable target that should be selected as the test target; and navigating the nanometer probes to land the nanometer probes on each test target and form an electrical connection between the nanometer probe and the corresponding test target. Sexual contact. The invention also discloses the nano-probe used in the system. |
| priorityDate |
2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |