http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I629748-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68728 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68735 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2014-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_784379cc514b809a821fa4e0f24dec44 |
| publicationDate | 2018-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I629748-B |
| titleOfInvention | Electrostatic carrier for thin substrate handling |
| abstract | The embodiments provided herein are large systems with respect to electrostatic chucks (ESCs). The electrostatic chuck can include a reduced number of stress inducing points, such as holes through the electrostatic chuck, which can improve the mechanical integrity of the electrostatic chuck. The electrodes disposed in the electrostatic chuck may be connected to the electrical contacts and the power source via conductive wires, which may be coupled or formed along the circumference of the electrostatic chuck. Thereby, the need for holes formed in the electrostatic chuck can be reduced or eliminated. Further, the gas passage may be formed on the top surface, the bottom surface, or both the top surface and the bottom surface. The gas passages reduce or eliminate the need for a gas passage formed through the electrostatic chuck and can facilitate heat transfer between the substrate holder, the electrostatic chuck, and the substrate coupled to the electrostatic chuck. |
| priorityDate | 2013-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.